1.

Conference Proceedings
Conference Proceedings
1. Litmas Plasma Abatement Long-Term Reliability Test
Vartanian, V. ; Beu, L. ; Stephens, T. ; Rivers, J. ; Perez, B. ; Kiehlbauch, M. ; Tonnisand, E. ; Graves, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.9-20,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
2.

Conference Proceedings
Conference Proceedings
2. Characterization of NF3 Chamber Cleans on Multiple CVD Platforms
Goolsby, B. ; Vartanian, V. ; Mendicino, L. ; Rivers, J. ; Vires, J. ; Soyemi, A. ; Sun, S.P. ; Turner, M. ; Esber, C.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.127-138,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15