1.

Conference Proceedings
Conference Proceedings
1. Damage Resulting from Polysilicon Gate Etching: Effect of Electrode Age and Sequencing within a Cassette
Mikulan, P.I. ; Awadelkarim, O.O. ; Fonash, S.J. ; Reinhardt, K.A. ; Rembetski, J.F.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.295-301,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
2.

Conference Proceedings
Conference Proceedings
2. *SURFACE CONDITIONING ISSUES RELATED TO PATTERNING AND ETCHING
Fonash, S.J. ; Ditizio, R.A. ; Gu, T. ; Mikulan, P.I. ; Awadelkarim, O.O. ; Collins, R.W. ; Rembetski, J.F. ; Reinhardt, K.A. ; Chan, Y.D.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.55-68,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
3.

Conference Proceedings
Conference Proceedings
3. 193-NM EXCIMER LASER-ASSISTED ETCHING OF POLYSILICON
Armacost, M.D. ; Babu, S.V. ; Nguyen, S.V. ; Rembetski, J.F.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.147-156,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76
4.

Conference Proceedings
Conference Proceedings
4. Degradation of Minority Carrier Generation Life- time in the Silicon Substrate during Poly-Si Gate RIE Overetch
Gu, T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Rembetski, J.F. ; Chan, Y.D.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.302-310,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21