1.

Conference Proceedings

Conference Proceedings
Rabinovich,V.L. ; Kuijk,J.C.C.van ; Zhang,S. ; Bart,S.F. ; Gilbert,J.R.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.114-119,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings

Conference Proceedings
Morris Ⅲ,A.S. ; Barl,S.F. ; Kane,D. ; Lorenz,G. ; Rabinovich,V.L.
Pub. info.: Optomechanical engineering 2000 : 7-8 November 2000, Boston, USA.  pp.55-62,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4198
3.

Conference Proceedings

Conference Proceedings
Kubby,J.A. ; Calamita,J. ; Chang,J. ; Chen,J. ; Gulvin,P. ; Lin,C.-C. ; Lofthus,R. ; Nowak,B. ; Su,Y. ; Tran,A. ; Burns,D. ; Bryzek,J. ; Gilbert,J. ; Hsu,C. ; Korsmeyer,T. ; Morris,A.S. ; Plowman,T.E. ; Rabinovich,V.L. ; Daiber,T.D. ; Scharf,B.R.
Pub. info.: Silicon-based and Hybrid Optoelectronics III.  pp.32-45,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4293