Yoshiyuki Show ; K. Takahashi ; R. Nishimura ; K. Kohara ; Y. Fukami ; H. Murata
Pub. info.:
Nanotubes and related nanostructures--2009 : symposium held November 30-December 4, 2009, Boston, Massachusetts, U.S.A.. pp.271-276, 2010. Warrendale, Pa.. Materials Research Society
Photon processing in microelectronics and photonics VI : 22-25 January 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
T. Sakano ; R. Nishimura ; H. Fukuoka ; Y. Yata ; T. Saiki
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15th International School on Quantum Electronics : laser physics and applications : 15-19 September, 2008, Bourgas, Bulgaria. pp.70270A-1-70270A-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
H. Sunaoshi ; T. Kamikubo ; R. Nishimura ; K. Tsuruta ; T. Katsumata
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EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany. pp.679208-1-679208-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
J. Yashima ; K. Ohtoshi ; N. Nakayamada ; H. Anze ; T. Katsumata ; T. Iijima ; R. Nishimura ; S. Fukutome ; N. Miyamoto ; S. Wake ; Y. Sakai ; S. Sakamoto ; S. Hara ; H. Higurashi ; K. Hattori ; K. Saito ; R. Kendall ; S. Tamamushi
Pub. info.:
Photomask and next-generation lithography mask technology XIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering