1.

Conference Proceedings
Conference Proceedings
1. Silicide Contacts for Sub-0.25 ｦﾌm Devices
Chen, L. J. ; Cheng, S. L. ; Chang, S. M. ; Peng, Y. C. ; Huang, H. Y. ; Cheng, L. W.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.123-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. The Influence of Stress on the Growth of Titanium Silicide Thin Films on (001) Silicon Substrates
Cheng, S. L. ; Chang, S. M. ; Huang, H. Y. ; Peng, Y. C. ; Chen, L. J. ; Tsui, B. Y. ; Tsai, C. J. ; Guo, S. S.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.9-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564