Scribner, D.A. ; Humayun, M.S. ; Justus B.L. ; Merritt, C.D. ; Klein. R.B. ; Howard, J.G. ; Peckerar, M.C. ; Perkins, F.K. ; Johnson, LJ. ; Bassett, W. ; Skeath, P. ; Weiland, J. ; de Juan, E., Jr. ; Finch, J. A. ; Graham, R.W. ; Trautfield, W.C. ; Taylor, S. M.
Pub. info.:
Nanostructure Science, Metrology, and Technology. pp.239-244, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering