1.
|
Conference Proceedings
|
Algots, J.M. ; Sandstrom, R. ; Partlo, W.N. ; Maroevic, P. ; Eva, E. ; Gerhard, M. ; Linder, R. ; Stietz, F.
Pub. info.: |
Optical Microlithography XVI. Part Three pp.1639-1650, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
|
2.
|
Conference Proceedings
|
Fomenkov, I.V. ; Partlo, W.N. ; Ness, R.M. ; Oliver, I.R. ; Melnychuk, S.T. ; Khodykin, O.V. ; Boewering, N.R.
Pub. info.: |
Emerging Lithographic Technologies VI. Part Two pp.634-647, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4688 |
|