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12 results

Conference Proceedings

1. a-Si:H THIN FILM TRANSISTORS AND LOGIC CIRCUITS FABRICATED IN AN INTEGRATED MULTICHAMBER SYSTEM

Kim, S. S. ; Wang, C. ; Parsons, G. N. ; Lucovsky, G.

Pub. info.:	Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.373-378, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	192

Conference Proceedings

2. μc SILICON THIN FILMS DEPOSITED BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITORS PROCESS

Wang, C ; Parsons, G. N. ; Kim, S. S. ; Buehler, E. C. ; Nemanich, R. J. ; Locuvsky, G.

Pub. info.:	Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.535-540, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	192

Conference Proceedings

3. Selective Area Cell Adhesion On Amorphous Silicon Using Patterned Self-Assembled Monolayers

Brown, D. T. ; Hernez, R. ; Parsons, G. N. ; Smith, L. L. ; Wang, K.

Pub. info.:	Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.. pp.A21.5-, 2001. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	609

Conference Proceedings

4. ESTIMATION OF DEFECT STATE DENSITIES FROM BULK PHOTOELECTRONIC PROPERTIES OF A-SI,Ge:H ALLOYS

Parsons, G. N. ; Lucovsky, G.

Pub. info.:	Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.341-346, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	95

Conference Proceedings

5. *CONTROL OF BONDED SiH IN SILICON OXIDES DEPOSITED BY REMOTE PLASMA ENHANCED CVD

Tsu, D. V. ; Parsons, G. N. ; Lucovsky, G. ; Watkins, M. W.

Pub. info.:	SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.73-84, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	105

Conference Proceedings

6. SUBSTRATE INTERACTIONS IN THE FORMATION OF AMORPHOUS SILICON/DIELECTRIC INTERFACES

Parsons, G. N. ; Kim, S. S. ; Lucovsky, G.

Pub. info.:	Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.265-270, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	149

Conference Proceedings

7. THE EFFECT OF WATER VAPOR AND OXYGEN IN THE PROCESSING ENVIRONMENT ON THE PROPERTIES OF SPUTTERED a-Si:H FILMS

Wang, C. ; Parsons, G. N. ; Lucovsky, G.

Pub. info.:	Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.75-80, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	149

Conference Proceedings

8. Substrate Surface Morphology and Growth Evolution of Low Temperature Silicon Nitride on Transparent Plastics

Smith, L. L. ; Arthur, C. B. ; Yang, C. S. ; Parsons, G. N.

Pub. info.:	Flat-panel display materials--1998 : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.133-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	508

Conference Proceedings

9. ANNEALING OF IRREVERSIBLE DEFECTS IN HYDROGENATED AND UNHYDROGENATED AMORPHOUS SILISON THIN FILMS

Parsons, G. N. ; Wang, C. ; Lucovsky, G.

Pub. info.:	Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.775-780, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	192

10.

Conference Proceedings

10. Material Balance Modeling of End-Point Uniformity in Silicon Dioxide Plasma Etching

Chambers, J. J. ; Min, K. ; Hauser, J. R. ; Parsons, G. N.

Pub. info.:	In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.. pp.41-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	502

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