1.

Conference Proceedings
Conference Proceedings
1. Dopants in Electroplated Copper
Andricacos, P.C. ; Parks, C. ; Cabral, C. ; Wachnik, R. ; Tsai, R. ; Maihotra, S. ; Locke, P. ; Fluegel, J. ; Horkans, J. ; Kwietniak, K. ; Uzoh, C. ; Rodbell, K.P. ; Gignac, L. ; Walton, E. ; Chung, D. ; Geffren, R.
Pub. info.: Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium.  pp.111-121,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-9
2.

Conference Proceedings
Conference Proceedings
2. Low-temperature hydrogen induced degradation of (Ba,Sr) TiO3 thin film capacitors
Baniecki, J. D. ; Parks, C. ; Laibowitz, R. B. ; Shaw, T. M. ; Lian, J. ; Costrini, G.
Pub. info.: Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.25-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 596
3.

Conference Proceedings
Conference Proceedings
3. The Effect of Forming Gas Annealing on Pt/(Ba,Sr)Tio3/Pt Thin Film Capacitors for Future DRAM Applications: Electrical Properties and Degradation Mechanisms
Baniecki, J.D. ; Parks, C. ; Laibowitz, R.B. ; Shaw, T.M. ; Lian, J.
Pub. info.: Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 655
4.

Conference Proceedings
Conference Proceedings
4. Low Temperature Borophosphosilicate Glass (BPSG) Process for High Aspect Ratio Gap Fill
Belyansky, M. ; Conti, R. ; Upham, A. ; Liucci, F. ; Parks, C. ; Lee, K.-H. ; Strane, J.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.47-52,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11
5.

Conference Proceedings
Conference Proceedings
5. CVD and Characterization of Fluorosilicate Glass
Shapiro, M.J. ; Matsuda, T. ; Nguyen, S.V. ; Parks, C. ; Dziobkowski, C.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.850-855,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
6.

Conference Proceedings
Conference Proceedings
6. Large-area interline CCD with low-dark current
Parks, C. ; Losee, D.L.
Pub. info.: Sensors and camera systems for scientific, industrial, and digital photography applications IV : 21-23 January, 2003, Santa Clara, California, USA.  pp.167-175,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5017