1.

Conference Proceedings
Conference Proceedings
1. First microprocessors with immersion lithography
Lee, D.-Y. ; Kim, I.-S. ; Jung, S.-G. ; Jung, M.-H. ; Park, J.-O. ; Oh, S.-H. ; Woo, S.-G. ; Cho, H.-K. ; Moon, J.-T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.119-128,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Tadpole Robot (TadRob) using ionic polymer metal composite (IPMC) actuator
Jung, J.J. ; Tak, Y. ; Kim, B. ; Park, J.-O. ; Lee, S.-K. ; Pak, J.
Pub. info.: Smart structures and materials 2003 : Electroactive polymer actuators and devices (EAPAD) : 3-6 March 2003, San Diego, California, USA.  pp.272-280,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5051
3.

Conference Proceedings
Conference Proceedings
3. Assessments on process parameters' influences to the proximity correction
Lee, E.-M. ; Lee, S.-W. ; Lee, D.-Y. ; Choi, S.-H. ; Park, J.-O. ; Jung, S.-G. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.287-295,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375