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Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.449-458, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Network Architectures, Management, and Applications IV. pp.635412-635412, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering