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Conference Proceedings

1. Effect of the Crystallization Conditions on the Epitaxial Relationship of Si Deposited on 3C-SiC(100)

Ferro, G. ; Polychroniadis, E.K. ; Panknin, D. ; Skorupa, W. ; Stoemenos, J. ; Monteil, Y.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.1563-1566, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

2. Growth Acceleration in FLASiC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Pezoldt, J. ; Morales, F.M. ; Stauden, T. ; Forster, C. ; Polychroniadis, E.K. ; Stoemenos, J. ; Panknin, D. ; Skorupa, W.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.295-298, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

3. Ion Beam Synthesis of SiC on Insulator Structures

Serre, Ch. ; Perez-Rodriguez, A. ; Romano-Rodriguez, A. ; Morante, J.R. ; Estcve, J. ; Acero, M.C. ; Panknin, D. ; Koegler, R. ; Skorupa, W.

Pub. info.:	Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.13-18, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-3

Conference Proceedings

4. FORMATION OF BURIED TERNARY SILICIDE LAYERS IN SILICON BY ION BEAM SYNTHESIS (IBS)

Panknin, D. ; Wieser, E. ; Skorupa, W. ; Querner, G. ; Vohse, H. ; Albrecht, J.

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.111-116, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

5. FORMATION OF CoSi2 WIRES BY MASKLESS IMPLANTATION WITH THE FOCUSED ION BEAM

Teichert, J. ; Bischoff, L. ; Hesse, E. ; Panknin, D. ; Skorupa, W.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.153-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

Conference Proceedings

6. FORMATION OF CoSi2 WIRES BY MASKLESS IMPLANTATION WITH THE FOCUSED ION BEAM

Teichert, J. ; Bischoff, L. ; Hesse, E. ; Panknin, D. ; Skorupa, W.

Pub. info.:	Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.741-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	316

Conference Proceedings

7. Application and Improvement of the Spreading Resistance Method for p-Type 6H-SiC

Gebel, T. ; Panknin, D. ; Riehn, R. ; Parascandola, S. ; Skorupa, W.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.741-744, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(1)

Conference Proceedings

8. Advanced Thermal Processing of Semiconductor Materials by Flash Lamp Annealing

Skorupa, W. ; Panknin, D. ; Voelskow, M. ; Anwand, W. ; Gebel, T. ; Yankov, R.A. ; Paul, Silke ; Lerch, Wilfried

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.195-200, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

Conference Proceedings

9. Microstructural Characterization of 3C-SiC Thin Films Grown by Flash Lamp Induced Liquid Phase Epitaxy

Ferro, G. ; Panknin, D. ; Polychroniadis, E. K. ; Monteil, Y. ; Skorupa, W. ; Stoemenos, J.

Pub. info.:	Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.295-298, 2005. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	483-485

10.

Conference Proceedings

10. High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing

Panknin, D. ; Wirth, H. ; Anwand, W. ; Brauer, G. ; Skorupa, W.

Pub. info.:	Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.877-880, 2000. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	338-342(2)

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