Palais, O. ; Simon, J.J. ; Yakimov, E. ; Martinuzzi, S.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.233-240, 2001. Pennington, N.J.. Electrochemical Society