1.

Conference Proceedings
Conference Proceedings
1. End Point Detection of GaAs Backside Via Etching in Capacitor on Via
P. Nam ; W. Luo ; X. Zeng ; J. Wang ; J. Uyeda
Pub. info.: State-of-the-art program on compound semiconductors 47 (SOTAPOCS 47) and wide-bandgap semiconductor materials and devices 8.  pp.5-8,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(5)
2.

Conference Proceedings
Conference Proceedings
2. Dry Etching of Sub-Micron Emitter in InP Heterojunction Double Bipolar Transistor Using Inductively Coupled Plasma
P. Nam ; P. C. Chang ; D. Sawdai ; V. Gambin ; D. Scott ; J. Gonzalez ; D. Li ; G. S. Leslie ; X. Zeng ; J. Wang ; D. Matheson ; L. Dang ; R. Elmadjian ; C. Grossman ; M. Barsky ; A. Gutierrez-Aitken ; A. Oki ; S. Olson
Pub. info.: State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI.  pp.88-93,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(2)