1.

Conference Proceedings
Conference Proceedings
1. Novel high refractive index fluids for 193-nm immersion lithography [6154-183]
Santillan J ; Otoguro A ; Itani t ; Fujii K ; Kagayama A ; Nakano T ; Nakayama N ; Tamatani H ; Fukuda S
Pub. info.: Optical Microlithography XIX.  pp.61544Q-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Full-field exposure tools for ArF immersion lithography [6154-174]
Lee A ; Otoguro A ; Itani, T ; Fujii K ; Shiraishi K ; Fujiwara T ; Ishii Y
Pub. info.: Optical Microlithography XIX.  pp.61544I-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154