1.

Conference Proceedings
Conference Proceedings
1. THE INFLUENCE OF A TiN CAP LAYER ON A TITANIUM-SALICIDE PROCESS: TITANIUM VS TITANIUM INTRIDE/TITANIUM
Zhang, S.-L ; Kaplan, W. ; Ostling M, ; Norstrom, H. ; Lindberg, A.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.233-238,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. BORON REDISTRIBUTION DURING FORMATION OF COBALT SILICIDES
Zaring, C. ; Svensson, B. G. ; Ostling M,
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.157-162,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
3.

Conference Proceedings
Conference Proceedings
3. THE INFLUENCE OF SUBSTRATE DOPING ON SILICIDE FORMATION WITH TUNGSTEN DEPOSITED FROM TUNGSTEN HEXAFLUORIDE
Zhang, S.-L ; Ostling M, ; Buchta, R. ; Smith, U. ; Linnros, J. ; Gong, S.-F.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.411-416,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
4.

Conference Proceedings
Conference Proceedings
4. OXIDATION OF SEMICONDUCTING IRON DISILICIDE (β-FeSI2)
Lundberg, Nils ; Eslesand, U. ; Ostling M,
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.417-422,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
5.

Conference Proceedings
Conference Proceedings
5. FORMATION OF NICKEL SILICIDES ON ION-AMORPHIZED SILICON
Mohadjeri, B. ; Linnros, J. ; Svensson, B. G. ; Ostling M, ; Johansson, S. ; d'Heurle, F. M.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.405-410,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260