1.

Conference Proceedings
Conference Proceedings
1. Measurement of the Thermal Conductivity of Thin P-SiC Films between 80 K and 600 K
Jansen,E. ; Ziermann,R. ; Obermeier,E. ; Krotz,G. ; Wagner,Ch.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.631-634,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
2.

Conference Proceedings
Conference Proceedings
2. High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines
Berg,J.von ; Ziermann,R. ; Reichert,W. ; Obermeier,E. ; Eickhoff,M. ; Krotz,G. ; Thoma,U. ; Boltshauser,Th. ; Cavalloni,C. ; Nendza,J.P.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part2  pp.1101-1104,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
3.

Conference Proceedings
Conference Proceedings
3. Structural Characterization of 3C-SiC Epitaxially Grown on Si-On-Insulator
Papaioannou,V. ; Pavlidou,E. ; Stoemenos,J. ; Reichert,W. ; Obermeier,E.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.445-448,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
4.

Conference Proceedings
Conference Proceedings
4. Micromachined inductive displacement sensor
Velten,Th. ; Krause,P. ; Stefan,O. ; Obermeier,E.
Pub. info.: Micromachined Devices and Components IV.  pp.331-338,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
5.

Conference Proceedings
Conference Proceedings
5. Static and dynamic characterization of polysilicon surface-micromachined actuators
Laible,V. ; Hagelin,P.M. ; Solgaard,O. ; Obermeier,E.
Pub. info.: Micromachined Devices and Components V.  pp.162-170,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3876
6.

Conference Proceedings
Conference Proceedings
6. Material-related effects on wet chemical micromachining of smart MEMS devices
Hein,A. ; Finkbeiner,S. ; Marek,J. ; Obermeier,E.
Pub. info.: Micromachined Devices and Components V.  pp.29-36,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3876