1.

Conference Proceedings
Conference Proceedings
1. Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes
Matsui, M. ; Nozoe, M. ; Arauchi, K. ; Takafuji, A. ; Nishiyama, H. ; Goto, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.584-592,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings
Conference Proceedings
2. Damage-free metrology of porous low-k dielectrics using CD-SEM
Cheng, Z.-H. ; Nozoe, M. ; Ezumi, M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.665-674,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375