1.

Conference Proceedings
Conference Proceedings
1. Manufacturing and inspection of assist-bar-type OPC mask
Tsuzuki,M. ; Nozaki,W. ; Akima,S. ; Yoshida,J. ; Oi,Y. ; Yamada,Y. ; Matsuzawa,Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.447-458,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
2.

Conference Proceedings
Conference Proceedings
2. Optimization of ArF alternating phase-shifting mask structure for 100-nm node and inspection of phase defects
Chiba,K. ; Takahashi,H. ; Nozaki,W. ; Akima,S. ; Nagashige,S. ; Yamada,Y.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.430-440,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562