1.

Conference Proceedings
Conference Proceedings
1. High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge
Enami,T. ; Wakabayashi,O. ; Nishisaka,T. ; Suzuki,N. ; Nire,T. ; Mizoguchi,H. ; Nakarai,H. ; Tanaka,H. ; Ariga,T. ; Shio,K. ; Okamoto,T. ; Noudomi,R. ; Tomaru,H. ; Nakao,K.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.1031-1040,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Performance of a highly stable 2-kHz-operation KrF Laser
Enami,T. ; Nakano,M. ; Watanabe,T. ; Ohbo,A. ; Hori,T. ; Ito,T. ; Nishisaka,T. ; Sumitani,A. ; Wakabayashi,O. ; Mizoguchi,H. ; Nakarai,H. ; Hisanaga,N. ; Matsunaga,T. ; Tanaka,H. ; Sakanishi,S. ; Okamoto,T. ; Noudomi,R. ; Suzuki,T. ; Takabayashi,Y.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.1076-1084,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679