1.

Conference Proceedings
Conference Proceedings
1. Ultra-line-narrowed F2 laser for microlithography
Komori,H. ; Ariga,T. ; Watanabe,H. ; Kumazaki,T. ; Kitatochi,N. ; Sasano,K. ; Ueno,Y. ; Nishisaka,T. ; Nohdomi,R. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.424-428,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
2.

Conference Proceedings
Conference Proceedings
2. Challenge of the F2 laser for dioptric projection system
Ariga,T. ; Watanabe,H. ; Kumazaki,T. ; Kitatochi,N. ; Sasano,K. ; Ueno,Y. ; Nishisaka,T. ; Nohdomi,R. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.1158-1165,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346