1.

Conference Proceedings
Conference Proceedings
1. Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations
Hatanaka, Y. ; Yanagi, H. ; Nawata, T. ; Inui, Y. ; Mabuchi, T. ; Yasumura, K. ; Nishijima, E. ; Fukuda, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.599-610,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Properties of ultra-large CaF2 crystals for the high NA optics
Hatanaka, Y. ; Yanagi, H. ; Nawata, T. ; Inui, Y. ; Mabuchi, T. ; Yasumura, K. ; Nishijima, E. ; Fukuda, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1279-1284,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings
Conference Proceedings
3. High-index fluoride materials for 193 nm immersion lithography [6154-47]
Nawata, T. ; Inui, Y. ; Masada, I. ; Nishijima, E. ; Satoh, H. ; Fukuda, T.
Pub. info.: Optical Microlithography XIX.  pp.61541A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
4.

Conference Proceedings
Conference Proceedings
4. Properties of large CaF2 crystals grown by CZ method for lens materials
Yanagi, H. ; Nawata, T. ; Inui, Y. ; Hatanaka, Y. ; Nishijima, E. ; Fukuda, T.
Pub. info.: Optical Microlithography XVII.  pp.1886-1893,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377