1.

Conference Proceedings
Conference Proceedings
1. Numerical Modeling of Gas-Phase Nucleation and Particle Growth During Chemical Vapor Deposition of Silicon
Girshick, S.L. ; Swihart, M.T. ; Suh, S.-M. ; Mahajan, M.R. ; Nijhawan, S.
Pub. info.: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.215-226,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-23
2.

Conference Proceedings
Conference Proceedings
2. The Control of Intrinsic Stresses in CVD Diamond Films With Multistep Processing
Nijhawan, S. ; Jankovsky, S. M. ; Sheldon, B. W.
Pub. info.: Diamond for electronic applications.  pp.163-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 416
3.

Conference Proceedings
Conference Proceedings
3. Grain Impingement and Intrinsic Stresses in CVD Diamond
Nijhawan, S. ; Rankin, J. ; Walden, B. L. ; Sheldon, B. W.
Pub. info.: Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.415-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 505