1.

Conference Proceedings
Conference Proceedings
1. The Role of Inert Gases in Reactive Ion Etching of Al2O3 -TiC (N58) Mixed Phases for Slider Air Bearing Surface Patterning
Nguyen, S.V. ; Perez, D. ; Craig, R. ; Straub, M. ; Ting, A. ; Hsiao, R. ; Hwang, C. ; Haney, D. ; Neumann, T.
Pub. info.: Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS).  pp.115-122,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-20
2.

Conference Proceedings
Conference Proceedings
2. 193-NM EXCIMER LASER-ASSISTED ETCHING OF POLYSILICON
Armacost, M.D. ; Babu, S.V. ; Nguyen, S.V. ; Rembetski, J.F.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.147-156,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76
3.

Conference Proceedings
Conference Proceedings
3. CVD and Characterization of Fluorosilicate Glass
Shapiro, M.J. ; Matsuda, T. ; Nguyen, S.V. ; Parks, C. ; Dziobkowski, C.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.850-855,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5