1.

Conference Proceedings
Conference Proceedings
1. AN ASSESSMENT OF ECR ARGON PLASMA ETCHING DAMAGE ON Si AND SiO2 INTERFACES
Nam, C. W. ; Ashok, S. ; Tsai, W. ; Day, M.E.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.861-868,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. ECR Hydrogen Plasma Treatment of Si: Defect Activation Under Thermal Anneal
Nam, C. W. ; Ashok, S.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.365-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
3.

Conference Proceedings
Conference Proceedings
3. EFFECTS OF LOW-TEMPERATURE SURFACE CLEANING USING ECR HYDROGEN PLASMA
Nam, C. W. ; Ashok, S. ; Tsai, W. ; Day, M. E.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.279-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315