1.

Conference Proceedings
Conference Proceedings
1. Sensitive Detection of Defects in α and β SiC by Raman Scattering
Nakashima, S. ; Nakatake, Y. ; Ishida, Y. ; Takahashi, T. ; Okumura, H.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.629-632,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
2.

Conference Proceedings
Conference Proceedings
2. Raman Microprobe Study of Carrier Density Profiles in Modulation-Doped 6H SiC
Nakashima, S. ; Nakatake, Y. ; Yano, Y. ; Harima, H. ; Ohtani, N. ; Katsuno, M.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.633-636,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
3.

Conference Proceedings
Conference Proceedings
3. Deposition Of Smooth Thin Cu Films In Deep Submicron Trench By Plasma CVD Reactor With H Atom Source
Shiratani, M. ; Jin, H.J. ; Nakatake, Y. ; Koga, K. ; Kinoshita, T. ; Watanabe, Y.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D9.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
4.

Conference Proceedings
Conference Proceedings
4. Raman Microprobe Study of Carrier Density Profiles in Modulation-Doped 6H SiC
Nakashima, S. ; Nakatake, Y. ; Yano, Y. ; Harima, H. ; Ohtani, N. ; Katsuno, M.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.633-636,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
5.

Conference Proceedings
Conference Proceedings
5. Sensitive Detection of Defects in α and β SiC by Raman Scattering
Nakashima, S. ; Nakatake, Y. ; Ishida, Y. ; Takahashi, T. ; Okumura, H.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.629-632,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393