1.

Conference Proceedings

Conference Proceedings
Enami,T. ; Nakano,M. ; Watanabe,T. ; Ohbo,A. ; Hori,T. ; Ito,T. ; Nishisaka,T. ; Sumitani,A. ; Wakabayashi,O. ; Mizoguchi,H. ; Nakarai,H. ; Hisanaga,N. ; Matsunaga,T. ; Tanaka,H. ; Sakanishi,S. ; Okamoto,T. ; Noudomi,R. ; Suzuki,T. ; Takabayashi,Y.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.1076-1084,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings

Conference Proceedings
Ogita,Y. ; Nakano,M. ; Masumura,H.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1813-1816,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
3.

Technical Paper

Technical Paper
Qie,X. ; Liu,X. ; Yu,Y. ; Zhang,C. ; Guo,C. ; Wang,D. ; Watanabe,T. ; Takagi,N. ; Kawasaki,Z. ; Ushio,T. ; Nakano,M. ; Nakamura,K.
Pub. info.: Proceedings of the 1999 International Conference on Lightning and Static Electricity (ICOLSE).  pp.71-76,  1999.  Warrendale, Pa..  Society of Automotive Engineering, Inc.
Title of ser.: SAE publication
Ser. no.: P-344
4.

Conference Proceedings

Conference Proceedings
Nakano,M. ; Nomura,S. ; Takamatsu,S. ; Tomita,K. ; Yoshinobu,T. ; Iwasaki,H.
Pub. info.: Micromachined Devices and Components IV.  pp.92-102,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
5.

Conference Proceedings

Conference Proceedings
Nishio,S. ; Tamura,K. ; Tsujine,Y. ; Fukao,T. ; Murata,J. ; Nakano,M. ; Matsuzaki,A. ; Sato,H. ; Ando,N. ; Hato,Y.
Pub. info.: Laser Applications in Microelectronic and Optoelectronic Manufacturing VI.  pp.266-277,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4274