1.

Conference Proceedings
Conference Proceedings
1. High Ramp Rate Rapid Thermal Annealing for Ultra-Shallow Junctions
Kohli, P. ; Li, H.-J. ; Ganguly, S. ; Kirichenko, T. ; Murto, B. ; Graetz, E. ; Zeitzoff, P. ; Pawlik, M. ; Merrill, P.B. ; Banerjee, S.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.3-14,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
2.

Conference Proceedings
Conference Proceedings
2. Influence of Arsenic Clustering and Precipitation on the Interstitial and Vacancy Concentration in Silicon
Brindos, R. ; Clark, M.H. ; Jones, K.S. ; Griglione, M. ; Gossmann, Hans-J. ; Agarwal, A. ; Murto, B. ; Andideh, E.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669