1.

Conference Proceedings
Conference Proceedings
1. Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers
Rembe,C. ; Caton,P. ; White,R.M. ; Muller,R.S.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.108-116,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings
Conference Proceedings
2. Micro-electro-mechanical systems spatial light modulator development
Olivier,S.S. ; Bierden,P.A. ; Bifano,T.G. ; Bishop,D.J. ; Carr,E. ; Cowan,W.D. ; Hart,M.R. ; Helmbrecht,M. ; Krulevitch,P. ; Muller,R.S. ; Sadoulet,B. ; Solgaard,O. ; Yu,J.
Pub. info.: High-resolution wavefront control : methods, devices, and applications II : 1-2 August 2000, San Diego, USA.  pp.26-31,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4124
3.

Conference Proceedings
Conference Proceedings
3. Micromachined microscanners for optical scanning
Kiang,M.-H. ; Solgaard,O. ; Muller,R.S. ; Lau,K.Y.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.82-90,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
4.

Conference Proceedings
Conference Proceedings
4. Integrated micromachined scanning display systems
Hagelin,P.M. ; Krishnamoorthy,U. ; Conant,R. ; Muller,R.S. ; Lau,K.Y. ; Solgaard,O.
Pub. info.: 18th Congress of the International Commission for Optics : Optics for the next millennium : 2-6 August, 1999, San Francisco, California.  pp.472-473,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3749
5.

Conference Proceedings
Conference Proceedings
5. Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS
Hart,M.R. ; Conant,R. ; Lau,K.Y. ; Muller,R.S.
Pub. info.: 18th Congress of the International Commission for Optics : Optics for the next millennium : 2-6 August, 1999, San Francisco, California.  pp.468-469,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3749
6.

Conference Proceedings
Conference Proceedings
6. Optical measurement methods to study dynamic behavior in MEMS
Rembe,C. ; Kant,R. ; Muller,R.S.
Pub. info.: Microsystems Engineering: Metrology and Inspection.  pp.127-137,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4400
7.

Conference Proceedings
Conference Proceedings
7. Actuation of polysilicon surface-micromachined mirrors
Tien,N.C. ; Kiang,M.-H. ; Daneman,M.J. ; Solgaard,O. ; Lau,K.Y. ; Muller,R.S.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics.  pp.53-59,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2687