1.

Conference Proceedings
Conference Proceedings
1. Polarized light scattering from metallic particles on silicon wafers
Kim,J.H. ; Ehrman,S.H. ; Mulholland,G.W. ; Germer,T.A.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA.  pp.281-290,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4449
2.

Conference Proceedings
Conference Proceedings
2. Polarization of light scattered by spheres on a dielectric film
Sung,L. ; Mulholland,G.W. ; Germer,T.A.
Pub. info.: Rough surface scattering and contamination : 21-23 July 1999, Denver, Colorado.  pp.296-303,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3784
3.

Conference Proceedings
Conference Proceedings
3. Selection of calibration particles for scanning surface inspection systems
Mulholland,G.W. ; Bryner,N. ; Liggett,W. ; Scheer,B.W. ; Goodall,R.K.
Pub. info.: Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado.  pp.104-118,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2862