1.

Conference Proceedings
Conference Proceedings
1. MEMSMaster: a new approach to prototype MEMS
Moulinier,D. ; Metsu,P. ; Brutails,M.-P. ; Bergeon,S. ; Nachtergaele,P.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.165-174,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
2.

Conference Proceedings
Conference Proceedings
2. Advanced integrated solution for MEMS design
Liateni,K. ; Moulinier,D. ; Affour,B. ; Boutamine,H. ; Karam,J.M. ; Veychard,D. ; Courtois,B. ; Cao,A.D.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.161-170,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680