1.

Conference Proceedings
Conference Proceedings
1. METHODOLOGY FOR THE DETECTION AND CHARACTERIZATION OF EQUIPMENT INDUCED DEFECTS FOR A TUNGSTEN LPCVD SYSTEM
Morrison, T. ; Tripathi, S. ; Moghadam, F.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.131-140,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
2.

Conference Proceedings
Conference Proceedings
2. Massively parallel microfluidics platform for storage and ultra-high-throughput screening
Brenan, C.J. ; Morrison, T. ; Stone, K. ; Heitner, T. ; Katz, A. ; Kanigan, T.S. ; Hess, R. ; Kwon, S.-J. ; Jung, H.-C. ; Pan, J.-G.
Pub. info.: Biomedical nanotechnology architectures and applications : 20-24 January 2002, San Jose, USA.  pp.560-569,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4626
3.

Conference Proceedings
Conference Proceedings
3. Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications [5853-108]
Philipsen, V. ; Leunissen, L. ; De Ruyter, R. ; Jonckheere, R. ; Marlin, P. ; Wakefield, C. ; Johnson, S. ; Cangemi, M. ; Buxbaum, A. ; Morrison, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.211-222,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853