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11 results

Conference Proceedings

1. Yield-enhanced layout generation by new design for manufacturability (DfM) flow

Kotani, T. ; Tanaka, S. ; Nojima, S. ; Hashimoto, K. ; Inoue, S. ; Mori, I.

Pub. info.:	Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.128-138, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5379

Conference Proceedings

2. Inspection and printability of programmed defects on reticles for 0.200- and 0.175-μm rule devices

Yamaguchi, S. ; Kanai, H. ; Komano, H. ; Sakurai, H. ; Kondo, T. ; Itoh, M. ; Mori, I. ; Higashikawa, I.

Pub. info.:	Photomask and X-Ray Mask Technology VI. pp.546-556, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3748

Conference Proceedings

3. Impact of OPC aggressiveness on mask maufacturability

Tanaka, S. ; Inoue, S. ; Kotani, T. ; Izuha, K. ; Mori, I.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.23-32, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

Conference Proceedings

4. Photomask repeater strategy for high-quality and low-cost reticle fabrication

Kyoh, S. ; Inoue, S. ; Ikenaga, O. ; Higaki, T. ; Shigemitsu, F. ; Mori, I. ; Kokubo, H. ; Hayashi, N. ; Irie, N. ; Ishii, Y. ; Umatate, T.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.16-22, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

Conference Proceedings

5. Maskless lithography: a low-energy electron-beam direct writing system with a common CP aperture and the recent progress

Nakasugi, T. ; Ando, A. ; Inanami, R. ; Sasaki, N. ; Ota, T. ; Nagano, O. ; Yamazaki, Y. ; Sugihara, K. ; Mori, I. ; Miyoshi, M. ; Okumura, K. ; Miura, A.

Pub. info.:	Emerging Lithographic Technologies VII. 2 pp.1051-1058, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5037

Conference Proceedings

6. Enhanced flexible mask specifications

Hasebe, S. ; Nojima, S. ; Mimotogi, S. ; Tanaka, S. ; Ikenaga, O. ; Hashimoto, K. ; Inoue, S. ; Mori, I.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.593-599, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

Conference Proceedings

7. Flexible mask specifications (Invited Paper)

Nojima, S. ; Mimotogi, S. ; Itoh, M. ; Ikenaga, O. ; Hasebe, S. ; Hashimoto, K. ; Inoue, S. ; Goto, M. ; Mori, I.

Pub. info.:	22nd Annual BACUS Symposium on Photomask Technology. Part One pp.187-196, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4889

Conference Proceedings

8. Flexible mask specifications

Nojima, S. ; Mimotogi, S. ; Itoh, M. ; Ikenaga, O. ; Hasebe, S. ; Hashimoto, S. ; Inoue, S. ; Goto, M. ; Mori, I.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology IX. pp.33-42, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4754

Conference Proceedings

9. Windmill artifact in multislice helical CT

Silver, M.D. ; Taguchi, K. ; Hein, I.A. ; Chiang, B. ; Kazama, M. ; Mori, I.

Pub. info.:	Medical Imaging 2003: Image Processing. Part Three pp.1918-1927, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5032

10.

Conference Proceedings

10. Tilted helical Feldkamp cone-beam reconstruction algorithm for multislice CT

Hein, I.A. ; Taguchi, K. ; Mori, I. ; Kazama, M. ; Silver, M.D.

Pub. info.:	Medical Imaging 2003: Image Processing. Part Three pp.1901-1910, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5032

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Author: Mori, I.