1.

Conference Proceedings
Conference Proceedings
1. HYDROGEN IN RF REACTIVE MAGNETRON SPUTTER SILICON NITRIDE FILMS
Lin, Chi-Hsien ; Wachtman, J.B. ; Sigel, G.H. ; Pfeffer, R.L. ; Monahan, T.P. ; Lareau, R.T.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.21-26,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. Electrical Studies on SF6 and 02 Plasma Etched Si(1-x)Ge(x)/Si p+-n Heterojunction
Zhong, W. ; Misra, D. ; Gaudani, J. ; Cole, M.W. ; Monahan, T.P. ; Lareau, R.T.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.149-156,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1