Ohguro, T. ; Nakamura, S. ; Saito, M. ; Ono, S. ; Harakawa, H. ; Morifuji, E. ; Yoshitomi, T. ; Morimoto, T. ; Momose, H.S. ; Katsumata, Y. ; Iwai, H.
Pub. info.:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.275-296, 1997. Pennington, NJ. Electrochemical Society
Momose, H.S. ; Ohguro, T. ; Nakamura, S. ; Katsumata, Y. ; Iwai, H.
Pub. info.:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.235-246, 1997. Pennington, NJ. Electrochemical Society
Ohguro, T. ; Naruse, H. ; Sugaya, H. ; Nakamura, S. ; Sugiyama, N. ; Morifuji, E. ; Kimijima, H. ; Yoshitomi, T. ; Morimoto, T. ; Momose, H.S. ; Katsumata, Y. ; Iwai, H.
Pub. info.:
ULSI process integration : proceedings of the first international symposium. pp.123-142, 1999. Pennington, NJ. Electrochemical Society
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.3-18, 2000. Pennington, N.J.. Electrochemical Society