Kuznetsov, A. Yu. ; Khodos, I. I. ; Linnros, J. ; Mohadjeri, B. ; Monakhov, E. V. ; Svensson, B. G.
Pub. info.:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.427-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Grelsson, O ; Soderbarg, A. ; Magnusson, U. ; Olsson, J. ; Mohadjeri, B.
Pub. info.:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.317-322, 1991. Pittsburgh, Pa.. Materials Research Society
Mohadjeri, B. ; Linnros, J. ; Svensson, B. G. ; Ostling M, ; Johansson, S. ; d'Heurle, F. M.
Pub. info.:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.405-410, 1992. Pittsburgh, Pa.. Materials Research Society