1.
Conference Proceedings
Arai, K. ; Mizutani, S.
Pub. info.:
Noise in Complex Systems and Stochastic Dynamics II . pp.492-503, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5471
2.
Conference Proceedings
Suetani, H. ; Horita, T. ; Mizutani, S.
Pub. info.:
Noise in Complex Systems and Stochastic Dynamics II . pp.445-456, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5471
3.
Conference Proceedings
Grodnensky, I. ; Mizutani, S. ; Slonaker, S.D.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVI . Part Two pp.846-851, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
4.
Conference Proceedings
Suetani, H. ; Mizutani, S. ; Horita, T.
Pub. info.:
Noise in Complex Systems and Stochastic Dynamics . pp.478-487, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5114
5.
Conference Proceedings
Mizutani, S. ; Suetani, H. ; Arai, K. ; Yoshimura, K.
Pub. info.:
Noise in Complex Systems and Stochastic Dynamics . pp.488-497, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5114
6.
Conference Proceedings
Mizutani, S. ; Arai, K.
Pub. info.:
Noise in Complex Systems and Stochastic Dynamics II . pp.531-540, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5471
7.
Technical Paper
He, Y. ; Shimoda, T. ; Mizutani, Y. ; Morino, Y. ; Mizutani, S.
Pub. info.:
SME technical paper . 2003. Society of Manufacturing Engineers