Lee, D.M. ; Mishra, K. ; Huber, W. ; Chevacharoenkul, S. ; Choi, S.P. ; Doh, I.H.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.820-830, 1994. Pennington, NJ. Electrochemical Society
Zhao, E. Y. ; Emami, R. ; Malik, I. ; Mishra, K. ; Krusell, W. C. ; Larios, J. de ; Hymes, D. J.
Pub. info.:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.137-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Mishra, K. ; Banan, M. ; Moody, J. ; Chandrasekhar, S.
Pub. info.:
Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.131-142, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.34-41, 1994. Pennington, NJ. Electrochemical Society