1.

Conference Proceedings

Conference Proceedings
Drescher,J. ; Balke,H. ; Bahr,H.-A. ; Milde,G. ; Gerlach,G.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.333-338,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
2.

Conference Proceedings

Conference Proceedings
Milde,G. ; Gerlach,G. ; Drescher,J. ; Balke,H.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.323-332,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561