1.

Conference Proceedings
Conference Proceedings
1. Vibrational analysis of 200-mm EPL masks
Mikkelson,A.R. ; Chen,C. ; Engelstad,R.L. ; Lovell,E.G.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.383-391,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Mechanical distortions in advanced optical reticles
Mikkelson,A.R. ; Sprague,M.A. ; Engelstad,R.L. ; Lovell,F.G. ; Trost,D.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.601-611,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
3.

Conference Proceedings
Conference Proceedings
3. Mechanical distortions in advanced optical reticles
Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G. ; Bloomstein,T.M. ; Mason,M.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.744-755,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
4.

Conference Proceedings
Conference Proceedings
4. Influence of film stress on advanced optical reticle distortions
Siewert,L.K. ; Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G. ; Mason,M.E. ; Mackay,R.S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1594-1604,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
5.

Conference Proceedings
Conference Proceedings
5. Pellicle-induced distortions in advanced optical reticles
Semke,W.H. ; Siewert,L.K. ; Mikkelson,A.R. ; Risius,E.A. ; Tang,N. ; Engelstad,R.L. ; Lovell,E.G. ; Zheng,J.-F. ; Dao,G.T.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.207-216,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
6.

Conference Proceedings
Conference Proceedings
6. Mask-related distortions of modified fused silica reticles for 157-nm lithography
Mikkelson,A.R. ; Abdo,A.Y. ; Cotte,E.P. ; Sohn,J. ; Engelstad,R.L. ; Lovell,E.G.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.914-925,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
7.

Conference Proceedings
Conference Proceedings
7. Mechanical analysis of hard pellicles for 157-nm lithography
Reu,P.L. ; Mikkelson,A.R. ; Schlax,M.P. ; Cotte,E.P. ; Siewert,L.K. ; Engelstad,R.L. ; Lovell,E.G. ; Dao,G.T. ; Zheng,J.-F.
Pub. info.: Optical Microlithography XIV.  4346  pp.1166-1174,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
8.

Conference Proceedings
Conference Proceedings
8. Mechanical distortions in advanced photomasks
Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.413-421,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546