1.

Conference Proceedings
Conference Proceedings
1. *DIFFUSION MODELING OF THE REDISTRIBUTION OF ION IMPLANTED IMPURITIES
Michel, A.E.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.3-14,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. DOPANT DIFFUSION IN TiSi2
d'Heurle, F.M. ; Michel, A.E. ; LeGoues, F.K. ; Scilla, G. ; Wetzel, J.T. ; Gas, P.
Pub. info.: Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A..  pp.333-338,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 77