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41 results

Conference Proceedings

1. SURFACE STUDIES OF LASER PROCESSING OF W ON GaAs FROM WF6

Tabbal, M. ; Lecours, A. ; Izquierdo, R. ; Meunier, M. ; Yelon, A.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.117-122, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

2. DIODE LASER INDUCED CHEMICAL VAPOR DEPOSITION OF WSiX FROM WF6 AND SiH4

Desjardins, P. ; Izquierdo, R. ; Meunier, M.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.127-132, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

3. LASER CVD OF TUNGSTEN ON SILICON OXYNITRIDE

Izquierdo, R. ; Lecours, A. ; Meunier, M.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.111-116, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

4. Electrical Properties of Annealed La0.5Sr0.5MnO3-d Thin Films Prepared by Pulsed Laser Deposition

Quenneville, F. ; Decorse, P. ; Meunier, M. ; Morin, F. ; Yelon, A.

Pub. info.:	Solid-state ionic devices : proceedings of the International Symposium. pp.218-227, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-13

Conference Proceedings

5. Novel NASICON-Polymer Composite Membrane for Electrically Driven Processes: Effect of Ceramic Thickness on Current Efficiency

Cormier, L.M. ; Ma, F. ; Bah, S.T. ; Guetre, S. ; Meunier, M. ; Paleologou, M. ; Yelon, A.

Pub. info.:	Solid-state ionic devices : proceedings of the International Symposium. pp.35-41, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-13

Conference Proceedings

6. Copper/Teflon AF 1600 Interface Interaction for Multilevel Interconnect Application

Popovici, D. ; Meunier, M. ; Sacher, E.

Pub. info.:	Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues. pp.44-57, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-8

Conference Proceedings

7. KrF EXCIMER LASER DEPOSITION OF TITANIUM FROM TiCl4

Izquierdo, R. ; Lavoie, C. ; Meunier, M.

Pub. info.:	In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.141-146, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	158

Conference Proceedings

8. KrF EXCIMER LASER DIRECT WRITING OF TITANIUM LINES: MODELING AND APPLICATION TO THE FABRICATION OF Ti:LiNbO3 WAVEGUIDES

Meunier, M. ; Lavoie, C. ; Boivin, S. ; Izquierdo, R. ; Desjardins, P. ; Najafi, S.I.

Pub. info.:	Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.625-630, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	201

Conference Proceedings

9. SURFACE INTERACTION BETWEEN WF6 AND GaAs UNDER UV LASER ILLUMINATION

Tabbal, M. ; Izquierdo, R. ; Meunier, M. ; Yelon, A.

Pub. info.:	Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.191-196, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	282

10.

Conference Proceedings

10. LASER-ASSISTED LOW TEMPERATURE DEPOSITION OF WSix FROM WF6 AND SiH4

Izquierdo, R. ; Desjardins, P. ; Elyaagoubi, N. ; Meunier, M.

Pub. info.:	Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.209-216, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	282

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