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Conference Proceedings

1. Development of a low-stress silicon-rich nitride film for micromachined sensor applications

Williams,M. ; Smith,J. ; Mark,J. ; Matamis,G. ; Gogoi,B.P.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.436-442, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

2. Release etch modeling analysis and the use of laser scanning microscopy for etch time prediction of micromachined structures

Matamis,G. ; Gogoi,B.P. ; Monk,D.J. ; McNeil,A. ; Burrows,V.A.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.267-278, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174