1.

Conference Proceedings
Conference Proceedings
1. Low-Temperature Preparation of Crystallized Zirconia Films by ECR Plasma MOCVD
Masumoto, Hiroshi ; Goto, Takashi
Pub. info.: Surface engineering for manufacturing applications : symposium held November 28-December 1, 2005, Boston, Massachusetts, U.S.A..  pp.183-188,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 890
2.

Conference Proceedings
Conference Proceedings
2. Effect of Piezoelectric Vibration on Electrical Properties of YSZ Film Prepared by MOCVD
Masumoto, Hiroshi ; Goto, Takashi
Pub. info.: Materials and devices for smart systems : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.93-100,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 785