1.

Conference Proceedings
Conference Proceedings
1. High-index fluoride materials for 193 nm immersion lithography [6154-47]
Nawata, T. ; Inui, Y. ; Masada, I. ; Nishijima, E. ; Satoh, H. ; Fukuda, T.
Pub. info.: Optical Microlithography XIX.  pp.61541A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Structure and optical property of large-size CaF2 single crystals grown by the CZ method [6154-100]
Masada, I. ; Nowata, T. ; Inui, Y. ; Date, T. ; Mabuchi, T. ; Nishjima, E. ; Fukuda, T.
Pub. info.: Optical Microlithography XIX.  pp.61542P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154