1.

Conference Proceedings
Conference Proceedings
1. Sub-40-nm pattern replication with ｡ﾞ20% process latitude by soft-contact x-ray lithography
Carter,D.J.D. ; Smith,H.I. ; Rhee,K.W. ; Marrian,C.R.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.70-78,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings
Conference Proceedings
2. Diffractive optical devices for spatial image separation
Prather,D.W. ; Levitt,H.L. ; Alexander,E.M. ; Marrian,C.R. ; Spezio,A.E.
Pub. info.: Optical pattern recognition VIII : 22-23 April, 1997, Orlando, Florida.  pp.421-429,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3073
3.

Conference Proceedings
Conference Proceedings
3. Proximity correction for e-beam lithography
Marrian,C.R. ; Chang,S. ; Peckerar,M.C.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.2-13,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621