1.

Conference Proceedings
Conference Proceedings
1. NUCLEATION OF TUNGSTEN ON TITANIUM NITRIDE WITH HYDROGEN REDUCTION OF TUNGSTEN HEXAFLUORIDE
Srinivas, D. ; Foster, R. ; Marcus, S. ; Arora, R. ; Rebenne, H.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.365-370,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
2.

Conference Proceedings
Conference Proceedings
2. Recent Developments in Ultratlsin Nitride Gate Stack Prepared by In-Situ RTP Multiprocessing for CMOS ULSI
Song, S.C. ; Kini, B.Y. ; Loan, H.F. ; Kwong, D.-L. ; Gardner, M. ; Fulford, J. ; Wristers, D. ; Gelpey, J. ; Marcus, S.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.45-56,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
3.

Conference Proceedings
Conference Proceedings
3. Pattern Related Non-Uniformities During Rapid Thermal Processing
Bremensdorfer, R. ; Marcus, S. ; Nenyei, Z.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.327-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
4.

Conference Proceedings
Conference Proceedings
4. Rapid Thermal Processing of Hydrogen Silsesquioxane for Low-Dielectric Constant Performance
Bremmer, J. N. ; Gray, D. ; Gruszynski, K. ; Liu, Y. ; Marcus, S.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.273-278,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565
5.

Conference Proceedings
Conference Proceedings
5. TiCl4 as a Precursor in the TiN Deposition by ALD or PEALD
Elers, K.-E. ; Winkler, J. ; Marcus, S.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.361-368,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01