1.

Conference Proceedings
Conference Proceedings
1. Comparison of Material Anisotropy in Flexible Poly (Arylether) with Rigid Polyamide Thin Films
Chao, T. ; Morgen, M. ; Lee, J.K. ; Ryan, E.T. ; Zhao, J.H. ; Malik, I. ; Ho, P.
Pub. info.: Dielectric material integration for microelectronics.  pp.95-102,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-3
2.

Conference Proceedings
Conference Proceedings
2. Chemical Mechanical Cleaning for Post-CMP Applications: Defects and Metals Results
Zhao, E. Y. ; Emami, R. ; Malik, I. ; Mishra, K. ; Krusell, W. C. ; Larios, J. de ; Hymes, D. J.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477