1.

Conference Proceedings
Conference Proceedings
1. Gold damascene interconnect technology for millimeter-wave photonics on silicon
Ishii,H. ; Yagi,S. ; Minotani,T. ; Royter,Y. ; Kudou,K. ; Yano,M. ; Nagatsuma,T. ; Machida,K. ; Kyuragi,H.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.210-219,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings
Conference Proceedings
2. Method for testing electrostatic discharge tolerance for fingerprint sensor LSI
Tanade,Y. ; Unno,H. ; Machida,K. ; Sato,N. ; Ishii,H. ; Shigematsu,S. ; Morimura,H. ; Kyuragi,H.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.81-88,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
3.

Conference Proceedings
Conference Proceedings
3. Stress analysis of mixed-mode crack of homogeneous and dissimilar materials by speckle photography
Machida,K. ; Hirano,T. ; Okamura,H.
Pub. info.: Second International Conference on Experimental Mechanics : 29 November-1 December 2000, Singapore.  pp.26-31,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4317
4.

Conference Proceedings
Conference Proceedings
4. IR-visible image sensor for diagnosis of ground object
Iwasaki,A. ; Kawada,M. ; Machida,K. ; Mase,I.
Pub. info.: Sensors, systems, and next-generation satellites V : 17-20 September 2001, Toulouse, France.  pp.458-465,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4540
5.

Conference Proceedings
Conference Proceedings
5. Microfabrication technology for high-speed Si-based systems
Ishii,H. ; Yagi,S. ; Saito,K. ; Hirata,A. ; Kudo,K. ; Yano,M. ; Nagatsuma,T. ; Machida,K. ; Kyuragi,H.
Pub. info.: Micromachining and Microfabrication.  pp.43-52,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230
6.

Conference Proceedings
Conference Proceedings
6. Phase defect inspection by differential interference
Ogawa,K. ; Kodama,J. ; Machida,K. ; Nakashima,K. ; Watakabe,Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.543-554,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409