M.C.M. van de Sanden ; P.J. van den Oever ; M. Creatore ; M. Schaepkens ; T. Miebach ; C.D. Iacovangelo ; R.C.M. Bosch ; M. Bijker ; M. Evers ; D.C. Schram ; W.M.M. Kessels
Pub. info.:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas. pp.447-454, 2004. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters